JPH01149471U - - Google Patents
Info
- Publication number
- JPH01149471U JPH01149471U JP4493988U JP4493988U JPH01149471U JP H01149471 U JPH01149471 U JP H01149471U JP 4493988 U JP4493988 U JP 4493988U JP 4493988 U JP4493988 U JP 4493988U JP H01149471 U JPH01149471 U JP H01149471U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- side wall
- heating
- single crystal
- semiconductor single
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 9
- 239000013078 crystal Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 2
- 230000005855 radiation Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000002994 raw material Substances 0.000 claims 2
- 230000017525 heat dissipation Effects 0.000 claims 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000003708 ampul Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4493988U JPH01149471U (en]) | 1988-04-01 | 1988-04-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4493988U JPH01149471U (en]) | 1988-04-01 | 1988-04-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01149471U true JPH01149471U (en]) | 1989-10-17 |
Family
ID=31271272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4493988U Pending JPH01149471U (en]) | 1988-04-01 | 1988-04-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01149471U (en]) |
-
1988
- 1988-04-01 JP JP4493988U patent/JPH01149471U/ja active Pending
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